A Micromachined Flow Shear Stress Sensor based on Thermal Transfer Principles
نویسندگان
چکیده
Micro hotlm shear-stress sensors have been developed by using surface micromachining techniques. The sensor consists of a suspended silicon-nitride diaphragm located on top of a vacuum-sealed cavity. A heating and heat-sensing element, made of poly-crystalline silicon material, resides on top of the diaphragm. The underlying vacuum cavity greatly reduces conductive heat loss to the substrate and therefore increases the sensitivity of the sensor. Testing of the sensor has been conducted in a wind-tunnel under three operation modes constant current, constant voltage, and constant temperature. Under the constanttemperature mode, a typical shear stress sensor exhibits a time constant of 72 s.
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